Influences of irradiation on the C–V and G/ ω –V characteristics of Si3N4 MIS capacitors

dc.contributor.authorKAYA, Ş.; YILMAZ, E. ; ÇETİNKAYA, A.O.
dc.date.accessioned2019-04-24T13:23:36Z
dc.date.available2019-04-24T13:23:36Z
dc.description.abstractThe effects of gamma-ray exposures on the electrical characteristics of Silicon Nitride (Si3N4) metal–insulator– semiconductor (MIS) structures have been investigated at room temperature. The MIS structures were irradiated with the GAMMACELL 220 Co-60 radioactive source. The distributions of interface states and series resistance were determined from the C–V and G/ω-V characteristics by taking into account the irradiation-dependent the barrier height. Both the values of series resistance, interface states and barrier heights enhanced with increasing dose. Experimental results demonstrate that gamma-ray irradiations have the significant effects on electrical characteristics of Si3N4 MIS structures.
dc.identifier.endpage052tr_TR
dc.identifier.issn2147-7736
dc.identifier.startpage048tr_TR
dc.identifier.urihttp://hdl.handle.net/20.500.12575/63381
dc.identifier.urihttps://doi.org/10.1501/nuclear_0000000012
dc.relationAnkara University Institute of Nuclear Sciencestr_TR
dc.relation.journalJournal of Nuclear Sciencestr_TR
dc.titleInfluences of irradiation on the C–V and G/ ω –V characteristics of Si3N4 MIS capacitorstr_TR

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